검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Spectroellipsometric detection of silicon substrate damage caused by radiofrequency sputtering of niobium oxide Lohner T, Serenyi M, Szilagyi E, Zolnai Z, Czigany Z, Khanh NQ, Petrik P, Fried M Applied Surface Science, 421, 636, 2017 |
| 2 |
Quantification of sputtering damage during NiO film deposition on a Si/SiO2 substrate using electrochemical impedance spectroscopy Sari H, Sakakura H, Kawade D, Itagaki M, Sugiyama M Thin Solid Films, 592, 150, 2015 |
| 3 |
Investigation of Sputtering Damage around pn Interfaces of Cu(In,Ga)Se-2 Solar Cells by Impedance Spectroscopy Sugiyama M, Sakakura H, Chang SW, Itagaki M Electrochimica Acta, 131, 236, 2014 |
| 4 |
Suppression of damage to organic light-emitting layers during deposition of Al-doped ZnO thin films by radio-frequency magnetron sputtering Yamada M, Matsumura M, Maeda Y Thin Solid Films, 519(10), 3352, 2011 |