| 1 |
Cleaning level of the target before deposition by reactive direct current magnetron sputtering
Utrera OH, Abundiz-Cisneros N, Sangines R, Diliegros-Godines CJ, Machorro R
Thin Solid Films, 646, 98, 2018 |
| 2 |
The influence of target erosion grade in the optoelectronic properties of AZO coatings growth by magnetron sputtering
Zubizarreta C, Berasategui EG, Ciarsolo I, Barriga J, Gaspar D, Martins R, Fortunato E
Applied Surface Science, 380, 218, 2016 |
| 3 |
ZnO film deposition by DC magnetron sputtering: Effect of target configuration on the film properties
Arakelova E, Khachatryan A, Kteyan A, Avjyan K, Grigoryan S
Thin Solid Films, 612, 407, 2016 |
| 4 |
Sputtering deposition of P-type SnO films using robust Sn/SnO2 mixed target
Hsu PC, Chen WC, Tsai YT, Kung YC, Chang CH, Wu CC, Hsieh HH
Thin Solid Films, 555, 57, 2014 |
| 5 |
Reactive sputtering of ZnO/ZnO:Al contacts for chalcopyrite solar modules
Koble C, Caballero R, Greiner D, Klaer J, Klenk R, Ruske F
Thin Solid Films, 520(4), 1295, 2011 |
| 6 |
Highly conductive alumina-added ZnO ceramic target prepared by reduction sintering and its effects on the properties of deposited thin films by direct current magnetron sputtering
Huang HS, Tung HC, Chiu CH, Hong IT, Chen RZ, Chang JT, Lin HK
Thin Solid Films, 518(21), 6071, 2010 |
| 7 |
Optimization of process parameters for sputtering of ceramic ZnO:Al2O3 targets for a-Si:H/mu c-Si:H solar cells
Dewald W, Sittinger V, Werner W, Jacobs C, Szyszka B
Thin Solid Films, 518(4), 1085, 2009 |
| 8 |
DC reactive sputtering of aluminium doped zinc oxide films for solar modules controlled by target voltage
Koble C, Greiner D, Klaer J, Klenk R, Meeder A, Ruske F
Thin Solid Films, 518(4), 1204, 2009 |
| 9 |
Influence of the calcium phosphate content of the target on the phase composition and deposition rate of sputtered films
Ozeki K, Fukui Y, Aoki H
Applied Surface Science, 253(11), 5040, 2007 |
| 10 |
Influence of sputtering conditions on ionic conductivity of LiPON thin films
Hamon Y, Douard A, Sabary F, Marcel C, Vinatier P, Pecquenard B, Levasseur A
Solid State Ionics, 177(3-4), 257, 2006 |
