검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Redistribution and electrical activation of ultralow energy implanted boron in silicon following laser annealing Whelan S, Privitera V, Italia M, Mannino G, Bongiorno C, Spinella C, Fortunato G, Mariucci L, Stanizzi M, Mittiga A Journal of Vacuum Science & Technology B, 20(2), 644, 2002 |
| 2 |
A novel fabrication process for polysilicon thin film transistors with source/drain contacts formed by deposition and lift-off of highly doped layers Cuscuna M, Bonfiglietti A, Carluccio R, Mariucci L, Mecarini F, Pecora A, Stanizzi M, Valletta A, Fortunato G Solid-State Electronics, 46(9), 1351, 2002 |