검색결과 : 2건
No. | Article |
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1 |
The structure of Si-SiO2 layers with high excess Si content prepared by magnetron sputtering Baran N, Bulakh B, Venger Y, Korsunska N, Khomenkova L, Stara T, Goldstein Y, Savir E, Jedrzejewski J Thin Solid Films, 517(18), 5468, 2009 |
2 |
Depth redistribution of components of SiOx layers prepared by magnetron sputtering in the process of their decomposition Khomenkova L, Korsunska N, Stara T, Venger Y, Sada C, Trave E, Goldstein Y, Jedrzejewski J, Savir E Thin Solid Films, 515(17), 6749, 2007 |