검색결과 : 7건
| No. | Article |
|---|---|
| 1 |
Chemically and geometrically enhanced focused ion beam micromachining Russell PE, Stark TJ, Griffis DP, Phillips JR, Jarausch KF Journal of Vacuum Science & Technology B, 16(4), 2494, 1998 |
| 2 |
Silicon Structures for in-Situ Characterization of Atomic-Force Microscope Probe Geometry Jarausch KF, Stark TJ, Russell PE Journal of Vacuum Science & Technology B, 14(6), 3425, 1996 |
| 3 |
Development of Focused Ion-Beam Machining Techniques for Permalloy Structures Thaus DM, Stark TJ, Griffis DP, Russell PE Journal of Vacuum Science & Technology B, 14(6), 3928, 1996 |
| 4 |
Characterization of Resist Profiles Using Water Enhanced Focused Ion-Beam Micromachining Stark TJ, Griffis DP, Russell PE Journal of Vacuum Science & Technology B, 14(6), 3990, 1996 |
| 5 |
H2O Enhanced Focused Ion-Beam Micromachining Stark TJ, Shedd GM, Vitarelli J, Griffis DP, Russell PE Journal of Vacuum Science & Technology B, 13(6), 2565, 1995 |
| 6 |
Force Probe Characterization Using Silicon 3-Dimensional Structures Formed by Focused Ion-Beam Lithography Edenfeld KM, Jarausch KF, Stark TJ, Griffis DP, Russell PE Journal of Vacuum Science & Technology B, 12(6), 3571, 1994 |
| 7 |
Proximity Effects in Low-Energy Electron-Beam Lithography Stark TJ, Edenfeld KM, Griffis DP, Radzimski ZJ, Russell PE Journal of Vacuum Science & Technology B, 11(6), 2367, 1993 |