화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 A Novel Fault Detection Scheme Based on Difference in Independent Component for Reliable Process Monitoring: Application on the Semiconductor Manufacturing Processes
Zhang C, Xu T, Li Y
Journal of Chemical Engineering of Japan, 53(7), 313, 2020
2 Development of indicators for the detection of equipment malfunctions and degradation estimation based on digital signals (alarms and events) from operation SCADA
Rodriguez-Lopez MA, Lopez-Gonzalez LM, Lopez-Ochoa LM, Las-Heras-Casas J
Renewable Energy, 99, 224, 2016