화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Localized defects in multilayer coatings
Stearns DG, Mirkarimi PB, Spiller E
Thin Solid Films, 446(1), 37, 2004
2 Practical approach for modeling extreme ultraviolet lithography mask defects
Gullikson EM, Cerjan C, Stearns DG, Mirkarimi PB, Sweeney DW
Journal of Vacuum Science & Technology B, 20(1), 81, 2002
3 Technique employing gold nanospheres to study defect evolution in thin films
Mirkarimi PB, Baker SL, Stearns DG
Journal of Vacuum Science & Technology B, 19(3), 628, 2001