| 1 |
Multi-pass spectroscopic ellipsometry
Stehle JL, Samartzis PC, Stamataki K, Piel JP, Katsoprinakis GE, Papadakis V, Schimowski X, Rakitzis TP, Loppinet B
Thin Solid Films, 555, 143, 2014 |
| 2 |
Automated metrology system including VUV spectroscopic ellipsometry and X-ray reflectometry for 300 mm silicon microelectronics
Boher P, Evrard P, Condat O, Dos Reis C, Defranoux C, Piel JP, Stehle JL, Bellandi E
Thin Solid Films, 455-56, 798, 2004 |
| 3 |
A new multiple wavelength ellipsometric imager: design, limitations and applications
Boher P, Thomas O, Piel JP, Stehle JL
Thin Solid Films, 455-56, 809, 2004 |
| 4 |
In situ spectroscopic ellipsometry for advanced process control in vertical furnaces
Lehnert W, Berger R, Schneider C, Pfitzner L, Ryssel H, Stehle JL, Piel JP, Neumann W
Thin Solid Films, 313-314, 442, 1998 |
| 5 |
Evaluation of automated spectroscopic ellipsometry for in-line process control - ESPRIT semiconductor equipment assessment (SEA) project 'IMPROVE'
Pickering C, Russell J, Nayar V, Imschweiler J, Wille H, Harrington S, Wiggins C, Stehle JL, Piel JP, Bruchez J
Thin Solid Films, 313-314, 446, 1998 |
| 6 |
High accuracy IR ellipsometer working with a Ge Brewster angle reflection polarizer and grid analyzer
Luttmann M, Stehle JL, Defranoux C, Piel JP
Thin Solid Films, 313-314, 631, 1998 |
| 7 |
Deep ultra-violet measurements of SiON anti-reflective coatings by spectroscopic ellipsometry
Defranoux C, Piel JP, Stehle JL
Thin Solid Films, 313-314, 742, 1998 |
| 8 |
Atomic scale characterization of semiconductors by in-situ real time spectroscopic ellipsometry
Boher P, Stehle JL
Thin Solid Films, 318(1-2), 120, 1998 |
| 9 |
Combined characterization of conductive materials by infrared spectroscopic ellipsometry and grazing X-ray reflectance
Boher P, Luttmann M, Stehle JL, Hennet L
Thin Solid Films, 319(1-2), 67, 1998 |
| 10 |
Combined Characterization of Group-IV Heterostructures and Materials by Spectroscopic Ellipsometry and Grazing X-Ray Reflectance
Boher P, Stehle JL, Hennet L
Thin Solid Films, 294(1-2), 37, 1997 |
