검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
High temperature line electrode assembly for continuous substrate flow VHFPECVD Schade K, Stahr F, Kuske J, Rohlecke S, Steinke O, Stephan U, Dekkers HFW Thin Solid Films, 502(1-2), 59, 2006 |
| 2 |
A new concept for mass production of large area thin-film silicon solar cells on glass Rech B, Repmann T, Wieder S, Ruske M, Stephan U Thin Solid Films, 502(1-2), 300, 2006 |
| 3 |
VHF plasma processing for in-line deposition systems Rudiger J, Brechtel H, Kottwitz A, Kuske J, Stephan U Thin Solid Films, 427(1-2), 16, 2003 |
| 4 |
Investigation About the Incorporation of Hydrogen into Amorphous-Carbon Schelz S, Kania P, Frauenheim T, Stephan U, Oelhafen P Journal of Vacuum Science & Technology A, 12(5), 2820, 1994 |