검색결과 : 10건
| No. | Article |
|---|---|
| 1 |
Implementation of an imprint damascene process for interconnect fabrication Schmid GM, Stewart MD, Wetzel J, Palmieri F, Hao JJ, Nishimura Y, Jen K, Kim EK, Resnick DJ, Liddle JA, Willson CG Journal of Vacuum Science & Technology B, 24(3), 1283, 2006 |
| 2 |
Quantifying acid generation efficiency for photoresist applications Tsiartas PC, Schmid GM, Johnson HF, Stewart MD, Willson CG Journal of Vacuum Science & Technology B, 23(1), 224, 2005 |
| 3 |
Vinyl ether formulations for step and flash imprint lithography Kim EK, Stewart MD, Wu K, Palmieri FL, Dickey MD, Ekerdt JG, Willson CG Journal of Vacuum Science & Technology B, 23(6), 2967, 2005 |
| 4 |
Formation of deprotected fuzzy blobs in chemically amplified resists Jones RL, Hu TJ, Lin EK, Wu WL, Goldfarb DL, Angelopoulos M, Trinque BC, Schmid GM, Stewart MD, Willson CG Journal of Polymer Science Part B: Polymer Physics, 42(17), 3063, 2004 |
| 5 |
Mesoscale Monte Carlo simulation of photoresist processing Schmid GM, Stewart MD, Burns SD, Willson CG Journal of the Electrochemical Society, 151(2), G155, 2004 |
| 6 |
Simulation model determines optimal tank farm design Al-Otaibi GA, Stewart MD Oil & Gas Journal, 102(7), 50, 2004 |
| 7 |
Spatial distribution of reaction products in positive tone chemically amplified resists Schmid GM, Stewart MD, Singh VK, Willson CG Journal of Vacuum Science & Technology B, 20(1), 185, 2002 |
| 8 |
Acid catalyst mobility in resist resins Stewart MD, Tran HV, Schmid GM, Stachowiak TB, Becker DJ, Willson CG Journal of Vacuum Science & Technology B, 20(6), 2946, 2002 |
| 9 |
Study of resolution limits due to intrinsic bias in chemically amplified photoresists Postnikov SV, Stewart MD, Tran HV, Nierode MA, Medeiros DR, Cao T, Byers J, Webber SE, Wilson CG Journal of Vacuum Science & Technology B, 17(6), 3335, 1999 |
| 10 |
Internal and external validation of a two-dimensional finite element code for river flood simulations Bates PD, Stewart MD, Siggers GB, Smith CN, Hervouet JM, Sellin RHJ Proceedings of The Institution of Civil Engineers-Water Maritime and Energy, 130(3), 127, 1998 |