검색결과 : 1건
No. | Article |
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1 |
Titanium oxynitride thin films sputter deposited by the reactive gas pulsing process Chappe JM, Martin N, Lintymer J, Sthal F, Terwagne G, Takadoum J Applied Surface Science, 253(12), 5312, 2007 |
No. | Article |
---|---|
1 |
Titanium oxynitride thin films sputter deposited by the reactive gas pulsing process Chappe JM, Martin N, Lintymer J, Sthal F, Terwagne G, Takadoum J Applied Surface Science, 253(12), 5312, 2007 |