검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Electron-assisted chemical etching of oxidized chromium Sun YM, Wang S, White JM, Stivers A, Liang T Applied Surface Science, 252(2), 311, 2005 |
| 2 |
Electron-beam-assisted etching of CrOx films by Cl-2 Wang S, Sun YM, White JM, Stivers A, Liang T Journal of Vacuum Science & Technology B, 23(1), 206, 2005 |
| 3 |
Advanced photolithographic mask repair using electron beams Liang T, Frendberg E, Lieberman B, Stivers A Journal of Vacuum Science & Technology B, 23(6), 3101, 2005 |
| 4 |
Progress in extreme ultraviolet mask repair using a focused ion beam Liang T, Stivers A, Livengood R, Yan PY, Zhang GJ, Lo FC Journal of Vacuum Science & Technology B, 18(6), 3216, 2000 |