검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Chemically Enhanced Sputtering in Fluorine-Containing Plasmas - Application to Tungsten Oxyfluoride Azens A, Stjerna B, Granqvist CG Thin Solid Films, 254(1-2), 1, 1995 |
| No. | Article |
|---|---|
| 1 |
Chemically Enhanced Sputtering in Fluorine-Containing Plasmas - Application to Tungsten Oxyfluoride Azens A, Stjerna B, Granqvist CG Thin Solid Films, 254(1-2), 1, 1995 |