검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Data and modeling of negative ion transport in gases of interest for production of integrated circuits and nanotechnologies Petrovic ZL, Raspopovic ZM, Stojanovic VD, Jovanovic JV, Malovic G, Makabe T, de Urquijo J Applied Surface Science, 253(16), 6619, 2007 |
| 2 |
The role of heavy particles in kinetics of low current discharges in argon at high electric field to gas number density ratio Petrovic ZL, Stojanovic VD Journal of Vacuum Science & Technology A, 16(1), 329, 1998 |