검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Modeling of a plasma etcher for charging free processing of nanoscale structures Radmilovic-Radjenovic M, Stojkovic A, Strinic A, Stojanovic V, Nikitovic Z, Malovic GN, Petrovic ZL Materials Science Forum, 518, 57, 2006 |
| 2 |
Neutralization of ion beams for reduction of charging damage in plasma etching Stojkovic A, Radmilovic-Radenovic M, Petrovic ZL Materials Science Forum, 494, 297, 2005 |