검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Vacuum ultraviolet ellipsometer using inclined detector as analyzer to measure stokes parameters and optical constants - With results for AlN optical constants Saito T, Ozaki K, Fukui K, Iwai H, Yamamoto K, Miyake H, Hiramatsu K Thin Solid Films, 571, 517, 2014 |
| 2 |
Polarimetric diagnosis of 193-nm lithography equipment using a mask with newly developed polarization optical elements Nomura H Thin Solid Films, 519(9), 2688, 2011 |
| 3 |
An auto-aligning photopolarimeter Lombardo G, Newton CJ, Rudin JC Molecular Crystals and Liquid Crystals, 398, 117, 2003 |