검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Depth profiling of ultrashallow B implants in silicon using a magnetic-sector secondary ion mass spectrometry instrument Napolitani E, Carnera A, Storti R, Privitera V, Priolo F, Mannino G, Moffatt S Journal of Vacuum Science & Technology B, 18(1), 519, 2000 |