검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
a-SiCx : H films deposited by plasma-enhanced chemical vapor deposition at low temperature used for moisture and corrosion resistant applications Jiang LJ, Chen X, Wang XH, Xu LQ, Stubhan F, Merkel KH Thin Solid Films, 352(1-2), 97, 1999 |
| 2 |
Moisture-resistant properties of SiNx films prepared by PECVD Lin H, Xu LQ, Chen X, Wang XH, Sheng M, Stubhan F, Merkel KH, Wilde J Thin Solid Films, 333(1-2), 71, 1998 |