화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Transmission electron microscopy of hard ceramic superlattices applied in silicon micro-electro-mechanical systems
Wrzesinska H, Ratajczak J, Studzinska K, Katcki J
Materials Chemistry and Physics, 81(2-3), 265, 2003
2 Field emission arrays by silicon micromachining
Debski T, Volland B, Barth W, Shi F, Hudek P, Rangelow IW, Grabiec P, Studzinska K, Zaborowski M, Mitura S
Journal of Vacuum Science & Technology B, 18(2), 896, 2000
3 Field emission cathode array with self-aligned gate electrode fabricated by silicon micromachining
Barth W, Debski T, Shi F, Hudek P, Kostic I, Rangelow IW, Biehl S, Iwert T, Grabiec P, Studzinska K, Mitura S, Bekh II, Lushkin AE, Il'chenko LG, Il'chenko VV, Haindl G
Journal of Vacuum Science & Technology B, 18(6), 3544, 2000