화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Measuring electron-beam landing angle in real time
Sturans MA, Hartley JG, Kendall RA
Journal of Vacuum Science & Technology B, 17(6), 2823, 1999
2 EL5: One tool for advanced x-ray and chrome on glass mask making
Sturans MA, Hartley JG, Pfeiffer HC, Dhaliwal RS, Groves TR, Pavick JW, Quickle RJ, Clement CS, Dick GJ, Enichen WA, Gordon MS, Kendall RA, Kostek CA, Pinckney DJ, Robinson CF, Rockrohr JD, Safran JM, Senesi JJ, Tressler EV
Journal of Vacuum Science & Technology B, 16(6), 3164, 1998