화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Evolution of sidewall roughness during reactive-ion etching of polymer waveguides
Pani SK, Wong CC, Sudharsanam K, Premachandran CS, Iyer MK
Journal of Vacuum Science & Technology B, 24(1), 163, 2006
2 Direct measurement of sidewall roughness of polymeric optical waveguides
Pani SK, Wong CC, Sudharsanam K, Lim V
Applied Surface Science, 239(3-4), 445, 2005
3 Effect of process parameters on sidewall roughness in polymeric optical waveguides
Pani SK, Wong CC, Sudharsanam K, Mhaisalkar SG, Lim V, Mohanraj S, Ramana PV
Thin Solid Films, 462-63, 471, 2004