검색결과 : 6건
| No. | Article |
|---|---|
| 1 |
Effects of CO2 and O-2 on the property of tetra methyl tetra cyclo siloxanes based low-k film Widodo J, Lu W, Mhaisalkar SG, Sudijono JL, Hsia LC, Shen L, Zeng KY Thin Solid Films, 472(1-2), 195, 2005 |
| 2 |
Effects of O-2 and He on the properties of the trimethyl silane based low-k films Widodo J, Goh LN, Lu W, Mhaisalkar SG, Ong S, Sudijono JL, Hsia LC, Tan PY, Zeng KY Journal of Vacuum Science & Technology B, 22(3), 1030, 2004 |
| 3 |
The impact of etch-stop layer for borderless contacts on deep submicron CMOS device performance - a comparative study Liao H, Lee PS, Goh LNL, Liu H, Sudijono JL, Elgin Q, Sanford C Thin Solid Films, 462-63, 29, 2004 |
| 4 |
Properties and gap-fill capability of HPD-CVD phosphosilicate glass films for subquarter-micrometer ULSI device technology Vassiliev VY, Lin C, Fung D, Hsieh J, Sudijono JL Electrochemical and Solid State Letters, 3(2), 80, 2000 |
| 5 |
Scanning-Tunneling-Microscopy Studies of Strain Relaxation and Misfit Dislocations in InAs Layers Grown on GaAs(110) and GaAs(111)A Belk JG, Sudijono JL, Yamaguchi H, Zhang XM, Pashley DW, Mcconville CF, Jones TS, Joyce BA Journal of Vacuum Science & Technology A, 15(3), 915, 1997 |
| 6 |
Different Growth Modes in GaAs(110) Homoepitaxy Holmes DM, Belk JG, Sudijono JL, Neave JH, Jones TS, Joyce BA Journal of Vacuum Science & Technology A, 14(3), 849, 1996 |