검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Nitrogen profile effects on the growth rate of gate oxides grown on nitrogen-implanted silicon Nam IH, Hong SI, Sim JS, Park BG, Lee JD, Lee SW, Kang MS, Kim YW, Suh KP, Lee WS Journal of Vacuum Science & Technology B, 19(1), 299, 2001 |