화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 Deposition of amorphous carbon nitride films using Ar/N-2 supermagnetron sputter
Kinoshita H, Kubota M, Ohno G
Thin Solid Films, 518(13), 3502, 2010
2 Sputter-assisted plasma CVD of polymer-like amorphous CNx : H films using supermagnetron plasma
Kinoshita H, Ikuta R, Sakurai K
Thin Solid Films, 515(9), 4121, 2007
3 Field-emission characteristics of diamond-like amorphous carbon films deposited by mixed gas (N-2 or H-2) controlled i-C4H10 supermagnetron plasma
Kinoshita H, Yamashita M
Thin Solid Films, 515(12), 5142, 2007
4 Formation of wide and narrow optical-band-gap amorphous-CNx : H films using i-C4H10/N-2 supermagnetron plasma
Kinoshita H, Ikuta R, Sakurai K
Applied Surface Science, 244(1-4), 314, 2005