검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Structural investigations of SiGe epitaxial layers grown by molecular beam epitaxy on Si(001) and Ge(001) substrates: II-Transmission electron microscopy and atomic force microscopy Faleev N, Sustersic N, Bhargava N, Kolodzey J, Magonov S, Smith DJ, Honsberg C Journal of Crystal Growth, 365, 35, 2013 |
| 2 |
Structural investigations of SiGe epitaxial layers grown by molecular beam epitaxy on Si(001) and Ge(001) substrates: I-High-resolutionx-ray diffraction and x-ray topography Faleev N, Sustersic N, Bhargava N, Kolodzey J, Kazimirov AY, Honsberg C Journal of Crystal Growth, 365, 44, 2013 |
| 3 |
Dry etching of SiGe alloys by xenon difluoride Xuan G, Adam TN, Lv PC, Sustersic N, Coppinger MJ, Kolodzey J, Suehle J, Fitzgerald E Journal of Vacuum Science & Technology A, 26(3), 385, 2008 |