검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
ArF resist-friendly etching technology Hayashi T, Morikawa Y, Suu K, Ishikawa M Journal of Vacuum Science & Technology B, 26(5), 1775, 2008 |
| 2 |
A novel deep etching technology for Si and quartz materials Morikawa Y, Koidesawa T, Hayashi T, Suu K Thin Solid Films, 515(12), 4918, 2007 |
| 3 |
Development of PZT sputtering method for mass-production Masuda T, Miyaguchi Y, Tanimura M, Nishioka Y, Suu K, Tani N Applied Surface Science, 169, 539, 2001 |