검색결과 : 2건
No. | Article |
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1 |
Automated electron cyclotron resonance plasma enhanced chemical vapor deposition system for the growth of rugate filters Swart PL, Lacquet BM, Chtcherbakov AA, Bulkin PV Journal of Vacuum Science & Technology A, 18(1), 74, 2000 |
2 |
Electron-Cyclotron-Resonance Plasma Deposition of Sin(X) for Optical Applications Bulkin PV, Swart PL, Lacquet BM Thin Solid Films, 241(1-2), 247, 1994 |