검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Bubbles in immersion lithography Switkes M, Rothschild M, Shedd TA, Burnett HB, Yeung MS Journal of Vacuum Science & Technology B, 23(6), 2409, 2005 |
| 2 |
Liquid immersion lithography: Why, how, and when? Rothschild M, Bloomstein TM, Kunz RR, Liberman V, Switkes M, Palmacci ST, Sedlacek JHC, Hardy D, Grenville A Journal of Vacuum Science & Technology B, 22(6), 2877, 2004 |
| 3 |
Extending optics to 50 nm and beyond with immersion lithography Switkes M, Kunz RR, Rothschild M, Sinta RF, Yeung M, Baek SY Journal of Vacuum Science & Technology B, 21(6), 2794, 2003 |
| 4 |
Method for testing electronic self-assembled monolayers using a flip-chip arrangement Spector SJ, Wynn CM, Switkes M, Kunz RR, Deneault SJ, Rothschild M Journal of Vacuum Science & Technology B, 21(6), 2865, 2003 |
| 5 |
Immersion lithography at 157 nm Switkes M, Rothschild M Journal of Vacuum Science & Technology B, 19(6), 2353, 2001 |