검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Radiation Stability of SiO2-Antireflective Film-Coated Sin and SiC X-Ray Mask Membranes Arakawa T, Okuyama H, Yamashita Y, Syoki T, Nagasawa H, Yamaguchi Y, Matsuo T, Noguchi F Journal of Vacuum Science & Technology B, 12(4), 2372, 1994 |