화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 TwinMag (TM) II: attempts to improve an excellent sputter tool
Heister U, Krempel-Hesse J, Szczyrbowski J, Teschner G, Bruch J, Brauer G
Thin Solid Films, 351(1-2), 27, 1999
2 Properties of SnO2 films prepared by DC and MF reactive sputtering
Ruske M, Brauer G, Pistner J, Pfafflin U, Szczyrbowski J
Thin Solid Films, 351(1-2), 146, 1999
3 Properties of SiO2 and Si3N4 layers deposited by MF twin magnetron sputtering using different target materials
Ruske M, Brauer G, Pistner J, Szczyrbowski J, Weigert M
Thin Solid Films, 351(1-2), 158, 1999
4 New low emissivity coating based on TwinMag (R) sputtered TiO2 and Si3N4 layers
Szczyrbowski J, Brauer G, Ruske M, Schilling H, Zmelty A
Thin Solid Films, 351(1-2), 254, 1999