검색결과 : 4건
No. | Article |
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1 |
TwinMag (TM) II: attempts to improve an excellent sputter tool Heister U, Krempel-Hesse J, Szczyrbowski J, Teschner G, Bruch J, Brauer G Thin Solid Films, 351(1-2), 27, 1999 |
2 |
Properties of SnO2 films prepared by DC and MF reactive sputtering Ruske M, Brauer G, Pistner J, Pfafflin U, Szczyrbowski J Thin Solid Films, 351(1-2), 146, 1999 |
3 |
Properties of SiO2 and Si3N4 layers deposited by MF twin magnetron sputtering using different target materials Ruske M, Brauer G, Pistner J, Szczyrbowski J, Weigert M Thin Solid Films, 351(1-2), 158, 1999 |
4 |
New low emissivity coating based on TwinMag (R) sputtered TiO2 and Si3N4 layers Szczyrbowski J, Brauer G, Ruske M, Schilling H, Zmelty A Thin Solid Films, 351(1-2), 254, 1999 |