검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Characterization of titanium oxynitride films deposited by low pressure chemical vapor deposition using amide Ti precursor Song XM, Gopireddy D, Takoudis CG Thin Solid Films, 516(18), 6330, 2008 |
| 2 |
Tetrakis(diethylamido) titanium (TDEAT) interactions with SiO2 and Cu substrates Tong J, Magtoto N, Kelber J Applied Surface Science, 220(1-4), 203, 2003 |
| 3 |
REMOTE PLASMA ENHANCED METAL ORGANIC CHEMI- CAL VAPOR DEPOSITION OF TiN FOR DIFFUSION BARRIER Yun JY, Rhee SW Korean Journal of Chemical Engineering, 13(5), 510, 1996 |