검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Infrared study on room-temperature atomic layer deposition of TiO2 using tetrakis(dimethylamino)titanium and remote-plasma-excited water vapor Kanomata K, Pansila P, Ahmmad B, Kubota S, Hirahara K, Hirose F Applied Surface Science, 308, 328, 2014 |
| 2 |
Atomic layer deposition of strontium titanate films from Sr((Pr3Cp)-Pr-i)(2), Ti[N(CH3)(2)](4) and H2O Rentrop S, Moebus T, Abendroth B, Strohmeyer R, Schmid A, Weling T, Hanzig J, Hanzig F, Stocker H, Meyer DC Thin Solid Films, 550, 53, 2014 |
| 3 |
Atomic layer deposition of TiO2 from tetrakis-dimethylamido-titanium and ozone Kim YW, Kim DH Korean Journal of Chemical Engineering, 29(7), 969, 2012 |