검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
MODELING OF SiO2 CVD FROM TEOS/OZONE IN A SEPARATE - GAS -INJECTION REACTOR Kim EJ, Gill WN Korean Journal of Chemical Engineering, 15(1), 56, 1998 |
| No. | Article |
|---|---|
| 1 |
MODELING OF SiO2 CVD FROM TEOS/OZONE IN A SEPARATE - GAS -INJECTION REACTOR Kim EJ, Gill WN Korean Journal of Chemical Engineering, 15(1), 56, 1998 |