검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Structural and electrical properties of SiO2 films deposited on Si substrates from tetraethoxysilane/oxygen plasmas Goghero D, Goullet A, Landesman JP Solid-State Electronics, 49(3), 369, 2005 |
| 2 |
Plasma-Enhanced Chemical-Vapor-Deposition of SiO2 Using Novel Alkoxysilane Precursors Bogart KH, Dalleska NF, Bogart GR, Fisher ER Journal of Vacuum Science & Technology A, 13(2), 476, 1995 |