검색결과 : 1건
No. | Article |
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1 |
Oxynitridation-Enhanced Diffusion of Phosphorus in (100) Silicon Chen NK, Lee C Journal of the Electrochemical Society, 142(6), 2051, 1995 |
No. | Article |
---|---|
1 |
Oxynitridation-Enhanced Diffusion of Phosphorus in (100) Silicon Chen NK, Lee C Journal of the Electrochemical Society, 142(6), 2051, 1995 |