검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Low temperature chemical vapor deposition of titanium nitride films from tetrakis(ethylmethylamido)titanium and ammonia Panda S, Kim J, Weiller BH, Economou DJ, Hoffman DM Thin Solid Films, 357(2), 125, 1999 |
| 2 |
Effect of Dimethylamine on the Chemical-Vapor-Deposition of Tin from Tetrakis(Dimethylamido)Titanium and Ammonia Weiller BH, Adamson SD Journal of the Electrochemical Society, 144(3), L40, 1997 |
| 3 |
Low-Temperature Atmospheric-Pressure Metal-Organic Chemical-Vapor-Deposition of Molybdenum Nitride Thin-Films Fix R, Gordon RG, Hoffman DM Thin Solid Films, 288(1-2), 116, 1996 |