검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Resistivity and structural defects of reactively sputtered TiN and HfN films Ando Y, Sakamoto I, Suzuki I, Maruno S Thin Solid Films, 343-344, 246, 1999 |
| No. | Article |
|---|---|
| 1 |
Resistivity and structural defects of reactively sputtered TiN and HfN films Ando Y, Sakamoto I, Suzuki I, Maruno S Thin Solid Films, 343-344, 246, 1999 |