검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
The Formation of TiSi2 by Rta Processing Wan WK, Wu ST Thin Solid Films, 298(1-2), 62, 1997 |
| 2 |
High-Aspect-Ratio Contacts - A Review of the Current Tungsten Plug Process Ireland PJ Thin Solid Films, 304(1-2), 1, 1997 |
| No. | Article |
|---|---|
| 1 |
The Formation of TiSi2 by Rta Processing Wan WK, Wu ST Thin Solid Films, 298(1-2), 62, 1997 |
| 2 |
High-Aspect-Ratio Contacts - A Review of the Current Tungsten Plug Process Ireland PJ Thin Solid Films, 304(1-2), 1, 1997 |