검색결과 : 1건
No. | Article |
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1 |
Instabilities of the reactive sputtering process involving one metallic target and two reactive gases Martin N, Rousselot C Journal of Vacuum Science & Technology A, 17(5), 2869, 1999 |
No. | Article |
---|---|
1 |
Instabilities of the reactive sputtering process involving one metallic target and two reactive gases Martin N, Rousselot C Journal of Vacuum Science & Technology A, 17(5), 2869, 1999 |