화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Metal Pattern Fabrication Using the Local Electric-Field of a Conducting Atomic-Force Microscope Probe
Brandow SL, Calvert JM, Snow ES, Campbell PM
Journal of Vacuum Science & Technology A, 15(3), 1455, 1997
2 New approaches to atomic force microscope lithography on silicon
Birkelund K, Thomsen EV, Rasmussen JP, Hansen O, Tang PT, Moller P, Grey F
Journal of Vacuum Science & Technology B, 15(6), 2912, 1997
3 Fabrication of Nanostructures on Silicon Surfaces on Wafer-Scale by Controlling Self-Organization Processes
Ogino T, Hibino H, Prabhakaran K
Journal of Vacuum Science & Technology B, 14(6), 4134, 1996