검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Comparative study of Ta, TaN and Ta/TaN bi-layer barriers for Cu-ultra low-k porous polymer integration Yang LY, Zhang DH, Li CY, Foo PD Thin Solid Films, 462-63, 176, 2004 |
| No. | Article |
|---|---|
| 1 |
Comparative study of Ta, TaN and Ta/TaN bi-layer barriers for Cu-ultra low-k porous polymer integration Yang LY, Zhang DH, Li CY, Foo PD Thin Solid Films, 462-63, 176, 2004 |