검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Growth mechanism of sputter deposited Ta and Ta-N thin films induced by an underlying titanium layer and varying nitrogen flow rates Chen GS, Chen ST, Huang SC, Lee HY Applied Surface Science, 169, 353, 2001 |
| No. | Article |
|---|---|
| 1 |
Growth mechanism of sputter deposited Ta and Ta-N thin films induced by an underlying titanium layer and varying nitrogen flow rates Chen GS, Chen ST, Huang SC, Lee HY Applied Surface Science, 169, 353, 2001 |