검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
optical properties and hydrophilic behaviors of TaOxNy thin films with and without rapid thermal annealing Hsieh JH, Chang CC, Cherng JS, Hsu FY Thin Solid Films, 517(17), 4711, 2009 |
| 2 |
Residual stress and thermal expansion behavior of TaOxNy films by the micro-cantilever method Jong CA, Chin TS, Fang WL Thin Solid Films, 401(1-2), 291, 2001 |