검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Fine-Line Patterning of Parylene-N by Reactive Ion Etching for Application as an Interlayer Dielectric Tacito RD, Steinbruchel C Journal of the Electrochemical Society, 143(6), 1974, 1996 |
| 2 |
Patterning of Benzocyclobutene by Reactive Ion Etching Tacito RD, Steinbruchel C Journal of the Electrochemical Society, 143(8), 2695, 1996 |