화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 Magnetization chirality of Ni-Fe and Ni-Fe/Mn-Ir asymmetric ring dots for high-density memory cells
Sasaki I, Nakatani R, Yoshida T, Otaki K, Endo Y, Kawamura Y, Yamamoto M, Takenaga T, Aya S, Kuroiwa T, Beysen S, Kobayashi H
Materials Science Forum, 512, 171, 2006
2 Improved fabrication process for Ru/BST/Ru capacitor by liquid source chemical vapor deposition
Tarutani M, Yamamuka M, Takenaga T, Kuroiwa T, Horikawa T
Thin Solid Films, 409(1), 8, 2002
3 Etching of (Ba,Sr)TiO3 film by chlorine plasma
Shibano T, Takenaga T, Nakamura K, Oomori T
Journal of Vacuum Science & Technology A, 18(5), 2080, 2000
4 Platinum etching in Ar/Cl-2 plasmas with a photoresist mask
Shibano T, Nakamura K, Takenaga T, Ono K
Journal of Vacuum Science & Technology A, 17(3), 799, 1999