화학공학소재연구정보센터
검색결과 : 18건
No. Article
1 On mechanisms governing AlN and AlGaN growth rate and composition in large substrate size planetary MOVPE reactors
Dauelsberg M, Brien D, Rauf H, Reiher F, Baumgartl J, Haberlen O, Segal AS, Lobanova AV, Yakovlev EV, Talalaev RA
Journal of Crystal Growth, 393, 103, 2014
2 AlInN MOVPE: growth chemistry and analysis of trends
Lobanova AV, Segal AS, Yakovlev EV, Talalaev RA
Journal of Crystal Growth, 352(1), 199, 2012
3 High growth rate MOVPE of Al(Ga)N in planetary reactor
Lundin WV, Nikolaev AE, Yagovkina MA, Brunkov PN, Rozhavskaya MM, Ber BY, Kazantsev DY, Tsatsulnikov AF, Lobanova AV, Talalaev RA
Journal of Crystal Growth, 352(1), 209, 2012
4 Investigation of nitride MOVPE at high pressure and high growth rates in large production reactors by a combined modelling and experimental approach
Dauelsberg M, Brien D, Pusche R, Schon O, Yakovlev EV, Segal AS, Talalaev RA
Journal of Crystal Growth, 315(1), 224, 2011
5 Convection-assisted chemical vapor deposition (CoCVD) of silicon on large-area substrates
Kunz T, Burkert I, Auer R, Lovtsus AA, Talalaev RA, Makarov YN
Journal of Crystal Growth, 310(6), 1112, 2008
6 Hydrogen effects in III-nitride MOVPE
Yakovlev EV, Talalaev RA, Segal AS, Lobanova A, Lundin WV, Zavarin EE, Sinitsyn MA, Tsatsulnikov AF, Nikolaev AE
Journal of Crystal Growth, 310(23), 4862, 2008
7 Growth conditions and surface morphology of AlN MOVPE
Lobanova AV, Yakovlev EV, Talalaev RA, Thapa SB, Scholz F
Journal of Crystal Growth, 310(23), 4935, 2008
8 Influence of the reactor inlet configuration on the AlGaN growth efficiency
Yakovlev EV, Talalaev RA, Kaluza N, Hardtdegen H, Bay HL
Journal of Crystal Growth, 298, 413, 2007
9 Modeling and process design of III-nitride MOVPE at near-atmospheric pressure in close coupled showerhead and planetary reactors
Dauelsberg M, Martin C, Protzmann H, Boyd AR, Thrush EJ, Kappeler J, Heuken M, Talalaev RA, Yakovlev EV, Kondratyev AV
Journal of Crystal Growth, 298, 418, 2007
10 Modelling of group-III nitride MOVPE in the closed coupled showerhead reactor and Planetary Reactor (R)
Martin C, Dauelsberg M, Protzmann H, Boyd AR, Thrush EJ, Heuken M, Talalaev RA, Yakovlev EV, Kondratyev AV
Journal of Crystal Growth, 303(1), 318, 2007