검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Characterization of polycrystalline AIN films using variable-angle spectroscopic ellipsometry Wang LP, Shim DS, Ma O, Rao VR, Ginsburg E, Talalyevsky A Journal of Vacuum Science & Technology A, 23(4), 1284, 2005 |
| No. | Article |
|---|---|
| 1 |
Characterization of polycrystalline AIN films using variable-angle spectroscopic ellipsometry Wang LP, Shim DS, Ma O, Rao VR, Ginsburg E, Talalyevsky A Journal of Vacuum Science & Technology A, 23(4), 1284, 2005 |