검색결과 : 6건
| No. | Article |
|---|---|
| 1 |
Smooth sidewall in InP-based photonic crystal membrane etched by N-2-based inductively coupled plasma Lee KH, Guilet S, Patriarche G, Sagnes I, Talneau A Journal of Vacuum Science & Technology B, 26(4), 1326, 2008 |
| 2 |
Modeling of the chemically assisted ion beam etching process: Application to the GaAs etching by Cl-2/Ar+ Elmonser L, Rhallabi A, Gaillard M, Landesman JP, Talneau A, Pommereau F, Bouadma N Journal of Vacuum Science & Technology A, 25(1), 126, 2007 |
| 3 |
Characterization of the feature-size dependence in Ar/Cl-2 chemically assisted ion beam etching of InP-based photonic crystal devices Berrier A, Mulot M, Anand S, Talneau A, Ferrini R, Houdre R Journal of Vacuum Science & Technology B, 25(1), 1, 2007 |
| 4 |
Development of chemically assisted etching method for GaAs-based optoelectronic devices Gaillard M, Rhallabi A, Elmonser L, Talneau A, Pommereau F, Pagnod-Rossiaux P, Bouadma N Journal of Vacuum Science & Technology A, 23(2), 256, 2005 |
| 5 |
Chemically assisted ion beam etching of GaAs by argon and chlorine gases: Experimental and simulation investigations Rhallabi A, Gaillard M, Elmonser L, Marcos G, Talneau A, Pommereau F, Pagnod-Rossiaux P, Landesman JP, Bouadma N Journal of Vacuum Science & Technology B, 23(5), 1984, 2005 |
| 6 |
Low-loss InP-based photonic-crystal waveguides etched with Ar/Cl-2 chemically assisted ion beam etching Mulot M, Anand S, Swillo M, Qiu M, Jaskorzynska B, Talneau A Journal of Vacuum Science & Technology B, 21(2), 900, 2003 |