검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Sub-150 nm,, high-aspect-ratio features using near-field phase-shifting contact lithography Dang H, Tan JLP, Horn MW Journal of Vacuum Science & Technology B, 21(3), 1143, 2003 |
| No. | Article |
|---|---|
| 1 |
Sub-150 nm,, high-aspect-ratio features using near-field phase-shifting contact lithography Dang H, Tan JLP, Horn MW Journal of Vacuum Science & Technology B, 21(3), 1143, 2003 |