검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
1 kV resist technology for microcolumn-based electron-beam lithography Lee KY, Hsu Y, Le P, Tan ZCH, Chang THP, Elian K Journal of Vacuum Science & Technology B, 18(6), 3408, 2000 |
| No. | Article |
|---|---|
| 1 |
1 kV resist technology for microcolumn-based electron-beam lithography Lee KY, Hsu Y, Le P, Tan ZCH, Chang THP, Elian K Journal of Vacuum Science & Technology B, 18(6), 3408, 2000 |